Formation and Mechano-Chemical Properties of Chromium Fluorides Originated from the Deposition of Carbon-Chromium Nanocomposite Coatings in the Reactive Atmosphere (Ar + CF) during Magnetron Sputtering.

The literature analysis did not indicate any studies on fluorination tests of carbon nanocomposite coatings doped with transition metals in a form of nanocrystalline metal carbide in amorphous carbon matrix (nc-MeC/a-C). As a model coating to investigate the effect of fluorination in a tetrafluoromethane (CF) atmosphere, a nanocomposite carbon coating doped with chromium-forming nanocrystals of chromium carbides in a-C matrix (nc-CrC/a-C) produced by magnetron sputtering from graphite targets and using a Pulse-DC type medium frequency power supply was chosen. After the deposition of the gradient chromium carbonitride (CrCN) adhesive sublayer, the fluorination of the main coating was conducted in a reactive mode in an (Ar + CF) atmosphere at various CF content.