Detailed modeling of hydrocarbon nanoparticle nucleation in acetylene discharges.

The initial stage of nanoparticle formation and growth in radiofrequency acetylene (C2H2) plasmas is investigated by means of a self-consistent one-dimensional fluid model. A detailed chemical kinetic scheme, containing electron impact, ion-neutral, and neutral-neutral reactions, has been developed in order to predict the underlying dust growth mechanisms and the most important dust precursors. The model considers 41 different species (neutrals, radicals, ions, and electrons) describing hydrocarbons (CnHm)containing up to 12 carbon atoms.

Role of the thermophoretic force on the transport of nanoparticles in dusty silane plasmas.

A comparison, based on numerical modeling, is made between the different forces experienced by nanoparticles present in a low pressure capacitively coupled parallel-plate silane (Si H4 ) discharge. We investigate in particular the influence of the thermophoretic force on the spatial distribution of the nanoparticle density profiles, due to a thermal gradient in gas temperature induced by heating or cooling of the electrodes. A series of simulations with a one-dimensional fluid model are performed with asymmetrical variation of the electrode temperatures.

Modeling of the formation and transport of nanoparticles in silane plasmas.

The behavior of nanoparticles in a low-pressure silane discharge is studied with the use of a self-consistent one-dimensional fluid model. Nanoparticles of a given (prescribed) radius are formed in the discharge by the incorporation of a dust growth mechanism, i.e.

Numerical investigation of particle formation mechanisms in silane discharges.

The formation of particles in low-pressure silane discharges has been studied extensively over the last decade. In this paper we try to identify, by numerical simulations, the precursors of the dust formation and we examine the gas-phase reactions leading to larger clusters, and finally to nanometer or micrometer sized particles. A one-dimensional fluid model is used, which incorporates silicon hydrides (Si(n)H(m)) containing up to 12 silicon atoms.