Thin-film filters used for dense wavelength division multiplexing (DWDM) applications are processed by a variety of deposition techniques, including ion-beam sputtering. Ion-beam sputtering produces high-quality coatings and provides flexibility of coating materials. However, DWDM filters consisting of oxide films that are reactively deposited by ion-beam sputtering, as in most sputter techniques, typically exhibit high levels of compressive stress.
View Article and Find Full Text PDFThin-film filters used for dense wavelength division multiplexing (DWDM) applications are processed by a variety of deposition techniques, including ion-beam sputtering. Ion-beam sputtering produces high-quality coatings and provides flexibility of coating materials. However, DWDM filters consisting of oxide films that are reactively deposited by ion-beam sputtering, as in most sputter techniques, typically exhibit high levels of compressive stress.
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