Self-forming TiBN Nanocomposite Multilayer Coating Prepared by Pulse Cathode Arc Method.

Novel multilayer structured TiBN coatings were deposited on Si (100) substrate using TiBN complex cathode plasma immersion ion implantation and deposition technique (PIIID). The coatings were characterized by X-ray diffraction (XRD), high-resolution transmission electron microcopy (HRTEM), energy-dispersive spectrometer (EDS) and ball-on-disk test. XRD results reveal that both samples of TiBN coatings have the main diffraction peak of TiN (200) and (220).