Low-loss and high-Q Ta(2)O(5) based micro-ring resonator with inverse taper structure.

A low-loss and high-Q Ta(2)O(5) based micro-ring resonator is presented. The micro-ring resonator and channel waveguide with core area of the 700 by 400 nm(2) were fabricated on amorphous Ta(2)O(5) thin films prepared by reactive sputtering at 300°C and post annealing at 650°C for 3 hours. The Ta(2)O(5) micro-ring resonator with a diameter of 200 μm was coupled to the channel waveguide with a coupled Q up to 38,000 at a 0.