50 kHz capacitive micromachined ultrasonic transducers for generation of highly directional sound with parametric arrays.

In this study, we examine the use of capacitive micromachined ultrasonic transducers (CMUTs) with vacuum- sealed cavities for transmitting directional sound with parametric arrays. We used finite element modeling to design CMUTs with 40-microm- and 60-microm-thick membranes to have resonance frequencies of 46 kHz and 54 kHz, respectively. The wafer bonding approach used to fabricate the CMUTs provides good control over device properties and the capability to fabricate CMUTs with large diameter membranes and deep cavities.

High-frequency measurements of blast wave propagation.

Blast wave propagation measurements were conducted to investigate nonlinear propagation effects on blast waveform evolution with distance. Measurements were made with a wide-bandwidth capacitor microphone for comparison with conventional 3.175-mm (1/8-in.