CVD Synthesis of MoS Using a Direct MoO Precursor: A Study on the Effects of Growth Temperature on Precursor Diffusion and Morphology Evolutions.

In this study, the influence of growth temperature variation on the synthesis of MoS using a direct MoO precursor was investigated. The research showed that the growth temperature had a strong impact on the resulting morphologies. Below 650 °C, no nucleation or growth of MoS occurred.