A Review on Micro/Nanoforming to Fabricate 3D Metallic Structures.

With the rapid development of micro-electromechanical systems (MEMS), micro/nanoscale fabrication of 3D metallic structures with complex structures and multifunctions is becoming more and more important due to the recent trend of product miniaturization. As a promising micromanufacturing approach based on plastic deformation, micro/nanoforming shows the attractive advantages of high productivity, low cost, near-net-shape, and excellent mechanical properties, compared with other non-silicon-based micromanufacturing technologies. However, micro/nanoforming is far less established due to the so-called size effects in terms of materials models, process laws, tooling design, etc.