Microfabrication and integration of a sol-gel PZT folded spring energy harvester.

This paper presents the methodology and challenges experienced in the microfabrication, packaging, and integration of a fixed-fixed folded spring piezoelectric energy harvester. A variety of challenges were overcome in the fabrication of the energy harvesters, such as the diagnosis and rectification of sol-gel PZT film quality and adhesion issues. A packaging and integration methodology was developed to allow for the characterizing the harvesters under a base vibration.

High-performance piezoresistive MEMS strain sensor with low thermal sensitivity.

This paper presents the experimental evaluation of a new piezoresistive MEMS strain sensor. Geometric characteristics of the sensor silicon carrier have been employed to improve the sensor sensitivity. Surface features or trenches have been introduced in the vicinity of the sensing elements.

MEMS-based power generation techniques for implantable biosensing applications.

Implantable biosensing is attractive for both medical monitoring and diagnostic applications. It is possible to monitor phenomena such as physical loads on joints or implants, vital signs, or osseointegration in vivo and in real time. Microelectromechanical (MEMS)-based generation techniques can allow for the autonomous operation of implantable biosensors by generating electrical power to replace or supplement existing battery-based power systems.

A finite element model of a MEMS-based surface acoustic wave hydrogen sensor.

Hydrogen plays a significant role in various industrial applications, but careful handling and continuous monitoring are crucial since it is explosive when mixed with air. Surface Acoustic Wave (SAW) sensors provide desirable characteristics for hydrogen detection due to their small size, low fabrication cost, ease of integration and high sensitivity. In this paper a finite element model of a Surface Acoustic Wave sensor is developed using ANSYS12© and tested for hydrogen detection.

A Reduced Three Dimensional Model for SAW Sensors Using Finite Element Analysis.

A major problem that often arises in modeling Micro Electro Mechanical Systems (MEMS) such as Surface Acoustic Wave (SAW) sensors using Finite Element Analysis (FEA) is the extensive computational capacity required. In this study a new approach is adopted to significantly reduce the computational capacity needed for analyzing the response of a SAW sensor using the finite element (FE) method. The approach is based on the plane wave solution where the properties of the wave vary in two dimensions and are uniform along the thickness of the device.

High Sensitivity MEMS Strain Sensor: Design and Simulation.

In this article, we report on the new design of a miniaturized strain microsensor. The proposed sensor utilizes the piezoresistive properties of doped single crystal silicon. Employing the Micro Electro Mechanical Systems (MEMS) technology, high sensor sensitivities and resolutions have been achieved.

Motion of a spherical particle in a cylindrical channel using arbitrary Lagrangian-Eulerian method.

A finite element particle transport model, consisting of Navier-Stokes and continuity equations defined in arbitrary Lagrangian-Eulerian (ALE) kinematics, is employed to describe the motion of a rigid uncharged spherical particle in a cylindrical channel of uniform cross-section. The wall correction factors for the spherical particle moving with a fluid confined in an infinitely long cylindrical channel, as well as in finite length channels are presented. Two finite channel effects are considered, namely, motion of the particle at the entrance and exit of an open channel, and the motion of a particle toward the capped end of the channel.