Acoustic, piezoelectric, and dielectric nonlinearities of AlN in coupled resonator filters for high RF power levels.

Coupled resonator filters (CRFs) are the new generation of BAW filters recently designed for the front-end modules of mobile transmission systems. Looking for designers' requirements, CRF devices have been characterized and modeled. The model based on equivalent circuits relies on material constants such as stiffness and electro-coupling coefficients, and works only for linear-mode propagation.