We have measured the thermal conductivity of amorphous and nanocrystalline silicon films with varying crystalline content from 85 K to room temperature. The films were prepared by the hot-wire chemical-vapor deposition, where the crystalline volume fraction is determined by the hydrogen (H) dilution ratio to the processing silane gas (SiH), R = H/SiH. We varied R from 1 to 10, where the films transform from amorphous for R < 3 to mostly nanocrystalline for larger R.
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