Optical properties of a Cr/4H-SiC photodetector in the spectral range from ultraviolet to extreme ultraviolet.

This work examines the electrical and radiometric characteristics of a photodiode based on a 4H-SiC semiconductor material with a semitransparent Cr Schottky barrier of about 7 nm thickness. The device had a photosensitive area 10 mm in diameter. The spectral responsivity was determined in the wavelength range from 40 nm to 400 nm, thus particularly extending the characterization into the vacuum- and extreme ultraviolet spectral ranges.