Silver- and Gold-Ordered Structures on Single-Crystal Silicon Surface After Thermal Deposition.

The formation mechanisms of Ag- and Au-ordered structures on single-crystal silicon (Si) (111) and Si (110) surfaces were researched using high-resolution scanning tunneling microscopy method. It was shown that different patterns of self-assembled nanostructures with very precise and regular geometric shapes can be produced by controlling process parameters of thermal metal spraying on the substrate. The surfaces of nanorelieves at each stage of deposition were researched, and the main stages of morphological transformation were fixed.