This work presents and discusses the design of an efficient gas sensor, as well as the technological process of its fabrication. The optimal dimensions of the different sensor elements including their deformation were determined considering the geometric modeling and the calculated moduli of the elasticity and thermal conductivity coefficients. Multicomponent SnBiMoO thin films were prepared by ionic layering on an anodic alumina membrane and were used as gas-sensitive layers in the sensor design.
View Article and Find Full Text PDFThe process of layer-by-layer ionic deposition of tin-tungsten oxide films on smooth silicon substrates and nanoporous anodic alumina matrices has been studied. To achieve the film deposition, solutions containing cationic SnF or SnCl and anionic NaWO or (NH)O·WO precursors have been used. The effect of the solution compositions on the films deposition rates, morphology, composition, and properties was investigated.
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