Pulsed spray evaporation chemical vapor deposition (PSE-CVD) was employed for the synthesis of cobalt-based spinel oxide thin films, Co(3-x)Fe(x)O4 with x = 0-1.56. XRD, Raman scattering and FTIR emission spectroscopy show that the normal spinel structure was retained for 0 < or = x < or = 0.
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