Pulse tube refrigerators are a critical enabling technology for many disciplines that require low temperatures. These refrigerators dominate the total power consumption of most modern cryostats, including those that reach millikelvin temperatures using additional cooling stages. In state-of-the-art commercial pulse tube refrigerators, the acoustic coupling between the driving compressor and the refrigerator is fixed and optimized for operation at base temperature.
View Article and Find Full Text PDFFeature sizes in integrated circuits have decreased substantially over time, and it has become increasingly difficult to three-dimensionally image these complex circuits after fabrication. This can be important for process development, defect analysis, and detection of unexpected structures in externally sourced chips, among other applications. Here, we report on a non-destructive, tabletop approach that addresses this imaging problem through x-ray tomography, which we uniquely realize with an instrument that combines a scanning electron microscope (SEM) with a transition-edge sensor (TES) x-ray spectrometer.
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