Neutron reflectometry and spectroscopic ellipsometry studies of cross-linked poly(dimethylsiloxane) after irradiation at 172 nm.

Poly(dimethylsiloxane) (PDMS) was irradiated under ambient conditions in air with a Xe2-excimer lamp. The formation of atomic oxygen and ozone during irradiation in air by V-UV photons results in the transformation of PDMS to silicon oxide. The irradiated surfaces were studied by spectroscopic ellipsometry and neutron reflectometry.