A joint calibration technique for improving measurement accuracy of voltage and current probes during synchronous operation for RF-based plasma devices.

This paper presents a joint calibration scheme for voltage (V) and current (I) probes that helps accurately resolve the voltage-current phase differences even when the difference is very close to 90°. The latter has been a major issue with V-I probes when used with miniature RF plasma devices such as the atmospheric pressure plasma jet (APPJ). Since the impedance of such miniature devices is predominantly capacitive, the phase difference between the voltage and current signals is very nearly 90°.