Kinetically Limited Bulk Polymerization of Polymer Thin Films by Initiated Chemical Vapor Deposition.

An experimental study and kinetic model analysis of the initiated chemical vapor deposition (iCVD) of polymer thin films have been performed at saturated monomer vapor conditions. Previous iCVD kinetic studies have focused on subsaturated monomer conditions where polymer deposition kinetics is known to be limited by monomer adsorption. However, iCVD kinetics at saturated conditions have so far not been systematically investigated, and it remains unclear whether the adsorption-limited phenomenon would still apply at saturation, given the abundance of monomer for reaction.