Self-calibration strategies for reducing systematic slope measurement errors of autocollimators in deflectometric profilometry.

Deflectometric profilometers are used to precisely measure the form of beam shaping optics of synchrotrons and X-ray free-electron lasers. They often utilize autocollimators which measure slope by evaluating the displacement of a reticle image on a detector. Based on our privileged access to the raw image data of an autocollimator, novel strategies to reduce the systematic measurement errors by using a set of overlapping images of the reticle obtained at different positions on the detector are discussed.

Simulations of applications using diaboloid mirrors.

The diaboloid is a reflecting surface that converts a spherical wave to a cylindrical wave. This complex surface may find application in new Advanced Light Source bending-magnet beamlines or in other beamlines that now use toroidal optics for astigmatic focusing. Here, the numerical implementation of diaboloid mirrors is described, and the benefit of this mirror in beamlines exploiting diffraction-limited storage rings is studied by ray tracing.

Diaboloidal mirrors: algebraic solution and surface shape approximations.

A new type of optical element that can focus a cylindrical wave to a point focus (or vice versa) is analytically described. Such waves are, for example, produced in a beamline where light is collimated in one direction and then doubly focused by a single optic. A classical example in X-ray optics is the collimated two-crystal monochromator, with toroidal mirror refocusing.

An ultrahigh-resolution soft x-ray microscope for quantitative analysis of chemically heterogeneous nanomaterials.

The analysis of chemical states and morphology in nanomaterials is central to many areas of science. We address this need with an ultrahigh-resolution scanning transmission soft x-ray microscope. Our instrument provides multiple analysis tools in a compact assembly and can achieve few-nanometer spatial resolution and high chemical sensitivity via x-ray ptychography and conventional scanning microscopy.

Super-resolution surface slope metrology of x-ray mirrors.

We present experimental, analytical, and numerical methods developed for reconstruction (deconvolution) of one-dimensional (1D) surface slope profiles over the spatial frequency range where the raw data are significantly perturbed due to the limited resolution of the measurement instrument. We characterize the spatial resolution properties of a profiler with the instrument's transfer function (ITF). To precisely measure the ITF, we apply a recently developed method utilizing test surfaces with 1D linear chirped height profiles of constant slope amplitude.

Ex situ metrology and data analysis for optimization of beamline performance of aspherical pre-shaped x-ray mirrors at the advanced light source.

Super high quality aspherical x-ray mirrors with a residual slope error of ∼100 nrad (root-mean-square) and a height error of ∼1-2 nm (peak-to-valley), and even lower, are now available from a number of the most advanced vendors utilizing deterministic polishing techniques. The mirror specification for the fabrication is based on the simulations of the desired performance of the mirror in the beamline optical system and is normally given with the acceptable level of deviation of the mirror figure and finish from the desired ideal shape. For example, in the case of aspherical x-ray mirrors designed for the Advanced Light Source (ALS) QERLIN beamline, the ideal shape is defined with the beamline application (conjugate) parameters and their tolerances.

Environmental influences on autocollimator-based angle and form metrology.

Deflectometric profilometers are indispensable tools for the precision form measurement of beam-shaping optics of synchrotrons and x-ray free electron lasers. They are used in metrology labs for x-ray optics worldwide and are crucial for providing measurement accuracy dictated by the form tolerances for modern state-of-the-art x-ray optics. Deflectometric profilometers use surface slope (angle) to assess form, and they utilize commercial autocollimators for the contactless slope measurement.

Optimization of the size and shape of the scanning aperture in autocollimator-based deflectometric profilometers.

Deflectometric profilometers based on industrial electronic autocollimators (ACs), as the ELCOMAT-3000, have become indispensable tools for precision form measurements of optical surfaces. A growing number of labs at synchrotron and free electron laser x-ray facilities are going for BESSY-II NOM-like versions of the AC-based profilometers. These tools have proven capable of characterizing state-of-the-art aspherical x-ray optics with an accuracy on the level of 100 nrad (root-mean-square) over the spatial frequency range limited by the size of the aperture used in the profilometer.

Modular soft x-ray spectrometer for applications in energy sciences and quantum materials.

Over the past decade, the advances in grating-based soft X-ray spectrometers have revolutionized the soft X-ray spectroscopies in materials research. However, these novel spectrometers are mostly dedicated designs, which cannot be easily adopted for applications with diverging demands. Here we present a versatile spectrometer design concept based on the Hettrick-Underwood optical scheme that uses modular mechanical components.

High precision tilt stage as a key element to a universal test mirror for characterization and calibration of slope measuring instruments.

The ultimate performance of surface slope metrology instrumentation, such as long trace profilers and auto-collimator based deflectometers, is limited by systematic errors that are increased when the entire angular range is used for metrology of significantly curved optics. At the ALS X-Ray Optics Laboratory, in collaboration with the HZB/BESSY-II and PTB (Germany) metrology teams, we are working on a calibration method for deflectometers, based on a concept of a universal test mirror (UTM) [V. V.

Optimized mirror shape tuning using beam weightings based on distance, angle of incidence, reflectivity, and power.

For glancing-incidence optical systems, such as short-wavelength optics used for nano-focusing, incorporating physical factors in the calculations used for shape optimization can improve performance. Wavefront metrology, including the measurement of a mirror's shape or slope, is routinely used as input for mirror figure optimization on mirrors that can be bent, actuated, positioned, or aligned. Modeling shows that when the incident power distribution, distance from focus, angle of incidence, and the spatially varying reflectivity are included in the optimization, higher Strehl ratios can be achieved.

Preface: The 5th International Workshop on X-ray Mirror Design, Fabrication, and Metrology.

Recent developments in synchrotron storage rings and free-electron laser-based x-ray sources with ever-increasing brightness and coherent flux have pushed x-ray optics requirements to new frontiers. This Special Topic gathers a set of articles derived from a subset of the key presentations of the International Workshop on X-ray Mirrors Fabrication (IWXM-2015) and Metrology held at Lawrence Berkley National Laboratory, Berkeley, California, USA, July 14-16, 2015. The workshop objective was to report on recent progress in x-ray synchrotron radiation mirrors fabrication as well as on new developments in related metrology tools and methods.

Performance optimization of a bendable parabolic cylinder collimating X-ray mirror for the ALS micro-XAS beamline 10.3.2.

The Advanced Light Source (ALS) beamline (BL) 10.3.2 is an apparatus for X-ray microprobe spectroscopy and diffraction experiments, operating in the energy range 2.

High-order multilayer coated blazed gratings for high resolution soft x-ray spectroscopy.

A grand challenge in soft x-ray spectroscopy is to drive the resolving power of monochromators and spectrometers from the 10(4) achieved routinely today to well above 10(5). This need is driven mainly by the requirements of a new technique that is set to have enormous impact in condensed matter physics, Resonant Inelastic X-ray Scattering (RIXS). Unlike x-ray absorption spectroscopy, RIXS is not limited by an energy resolution dictated by the core-hole lifetime in the excitation process.

Development and calibration of mirrors and gratings for the soft x-ray materials science beamline at the Linac Coherent Light Source free-electron laser.

This work discusses the development and calibration of the x-ray reflective and diffractive elements for the Soft X-ray Materials Science (SXR) beamline of the Linac Coherent Light Source (LCLS) free-electron laser (FEL), designed for operation in the 500 to 2000 eV region. The surface topography of three Si mirror substrates and two Si diffraction grating substrates was examined by atomic force microscopy (AFM) and optical profilometry. The figure of the mirror substrates was also verified via surface slope measurements with a long trace profiler.

High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths.

Volume x-ray gratings consisting of a multilayer coating deposited on a blazed substrate can diffract with very high efficiency, even in high orders if diffraction conditions in-plane (grating) and out-of-plane (Bragg multilayer) are met simultaneously. This remarkable property, however, depends critically on the ability to create a structure with near atomic perfection. In this Letter we report on a method to produce these structures.

Optimal measurement strategies for effective suppression of drift errors.

Drifting of experimental setups with change in temperature or other environmental conditions is the limiting factor of many, if not all, precision measurements. The measurement error due to a drift is, in some sense, in-between random noise and systematic error. In the general case, the error contribution of a drift cannot be averaged out using a number of measurements identically carried out over a reasonable time.

A dedicated superbend x-ray microdiffraction beamline for materials, geo-, and environmental sciences at the advanced light source.

A new facility for microdiffraction strain measurements and microfluorescence mapping has been built on beamline 12.3.2 at the advanced light source of the Lawrence Berkeley National Laboratory.

Magnetic resonance imaging with an optical atomic magnetometer.

We report an approach for the detection of magnetic resonance imaging without superconducting magnets and cryogenics: optical atomic magnetometry. This technique possesses a high sensitivity independent of the strength of the static magnetic field, extending the applicability of magnetic resonance imaging to low magnetic fields and eliminating imaging artifacts associated with high fields. By coupling with a remote-detection scheme, thereby improving the filling factor of the sample, we obtained time-resolved flow images of water with a temporal resolution of 0.

Surface roughness of stainless-steel mirrors for focusing soft x rays.

We have used polished stainless steel as a mirror substrate to provide focusing of soft x rays in grazing-incidence reflection. The critical issue of the quality of the steel surface, polished and coated with gold, is discussed in detail. A comparison is made to a polished, gold-coated, electroless nickel surface, which provides a smoother finish.