Compensation of lens manufacturing errors and inhomogeneities by filtering view images in three-dimensional lenticular displays.

For a multiview autostereoscopic three-dimensional display based on the lenticular lens, the manufacturing errors and inhomogeneities of the lenticular sheet can deteriorate the view image quality. A calibration method is proposed by filtering the pixel mapping of all view images. Each view is first sequentially turned on to show a white test image, and the intensity distribution of every view will be analyzed.

Detection of overlay error in double patterning gratings using phase-structured illumination.

With the help of simulations we study the benefits of using coherent, phase-structured illumination to detect the overlay error in resist gratings fabricated by double patterning. Evaluating the intensity and phase distribution along the focused spot of a high numerical aperture microscope, the capability of detecting magnitude and direction of overlay errors in the range of a few nanometers is investigated for a wide range of gratings. Furthermore, two measurement approaches are presented and tested for their reliability in the presence of white Gaussian noise.