Towards Microscale Flight: Fabrication, Stability Analysis, and Initial Flight Experiments for 300 μm × 300 μm × 1.5 μm Sized Untethered MEMS Microfliers.

This paper presents modeling, designs, and initial experimental results demonstrating successful untethered microscale flight of stress-engineered microscale structures propelled by thermal forces. These MEMS Microfliers are 300 μm×300 μm×1.5 μm in size and are fabricated out of polycrystalline silicon using a surface micromachining process.