The Optoelectronic Properties of p-Type Cr-Deficient Cu[CrMg]O Films Deposited by Reactive Magnetron Sputtering.

CuCrO is one of the most promising p-type transparent conductive oxide (TCO) materials. Its electrical properties can be considerably improved by Mg doping. In this work, Cr-deficient CuCrO thin films were deposited by reactive magnetron sputtering based on 5 at.