Publications by Tsung Yi Chiang

Publications by authors named "Tsung Yi Chiang"

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Synchrotron-radiation-stimulated etching of polydimethylsiloxane using XeF(2) as a reaction gas.

Tsung Yi Chiang Tetsuya Makimura Tingchao He Shuichi Torii Tomoko Yoshida

J Synchrotron Radiat

January 2010

The synchrotron radiation (SR) stimulated etching of silicon elastomer polydimethylsiloxane (PDMS) using XeF(2) as an etching gas has been demonstrated. An etching system with differential pumps and two parabolic focusing mirrors was constructed to perform the etching. The PDMS was found to be effectively etched by the SR irradiation under the XeF(2) gas flow, and the etching process was area-selective and anisotropic.

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