High Quality Factors in Superlattice Ferroelectric HfZrO Nanoelectromechanical Resonators.

The discovery of ferroelectricity and advances in creating polar structures in atomic-layered hafnia-zirconia (HfZrO) films spur the exploration of using the material for novel integrated nanoelectromechanical systems (NEMS). Despite its popularity, the approach to achieving high quality factors (s) in resonant NEMS made of HfZrO thin films remains unexplored. In this work, we investigate the realization of high s in HfZrO nanoelectromechanical resonators by stress engineering via the incorporation of alumina (AlO) interlayers.