Development of 1.2-GHz ECR ion source and Wien filter for inexpensive ion beam processing system.

A desktop-sized ion beam processing system with an inexpensive electron cyclotron resonance (ECR) ion source has been developed for industrial applications at the National Institute of Technology, Toyama College. A commercially available 1.2- to 1.

Effects of fundamental and second harmonic electron cyclotron resonances on ECRIS.

A new concept on magnetic field of plasma production and confinement has been proposed to enhance efficiency of an electron cyclotron resonance (ECR) plasma for broad and dense ion beam source under the low pressure. The magnetic field configuration is constructed by a pair of comb-shaped magnet which has opposite polarity to each other, and which cylindrically surrounds the plasma chamber. This magnetic configuration suppresses the loss due to E x B drift, and then plasma confinement is enhanced.

Multicharged iron ions produced by using induction heating vapor source.

Multiply charged Fe ions are produced from solid pure material in an electron cyclotron resonance (ECR) ion source. We develop an evaporator by using induction heating with an induction coil which is made of bare molybdenum wire partially covered by ceramic beads in vacuum and surrounding and heating directly the pure Fe rod. Heated material has no contact with insulators, so that outgas is minimized.