Improving optical bench radius measurements using stage error motion data.

We describe the application of a vector-based radius approach to optical bench radius measurements in the presence of imperfect stage motions. In this approach, the radius is defined using a vector equation and homogeneous transformation matrix formulism. This is in contrast to the typical technique, where the displacement between the confocal and cat's eye null positions alone is used to determine the test optic radius.

Correcting for stage error motions in radius measurements.

Traceable radius of curvature measurements are critical for precision optics manufacturing. An optical bench measurement is repeatable and is the preferred method for low-uncertainty applications. With an optical bench, the displacement of the optic is measured as it is moved between the cat's eye and the confocal positions, each identified using a figure measuring interferometer.