Fabrication of multilayer Laue lenses by a combination of pulsed laser deposition and focused ion beam.

X-ray diffractive techniques using Fresnel zone plate lenses of various forms are of great technical interest because of their ability to form images at very high spatial resolution, but the zone plates are unfortunately very hard to produce by lithography. Alternatively, multilayer Laue lenses (MLLs) and multilayer zone plates are used due to the higher and easily adjustable aspect ratio necessary for different wavelengths. In this paper, the fabrication of a MLL by a combination of pulsed laser deposition and focused ion beam machining is described.