Recent Developments in Mechanical Ultraprecision Machining for Nano/Micro Device Manufacturing.

The production of many components used in MEMS or NEMS devices, especially those with com-plex shapes, requires machining as the best option among manufacturing techniques. Ultraprecision machining is normally employed to achieve the required shapes, dimensional accuracy, or improved surface quality in most of these devices and other areas of application. Compared to conventional machining, ultraprecision machining involves complex phenomenal processes that require extensive investigations for a better understanding of the material removal mechanism.