Two-dimensional analytical description of the plasma potential in a magnetron discharge.

Simple analytical formulas are proposed to describe the plasma potential in a steady-state magnetron discharge, based on the results of various experiments and numerical simulations reported in the literature. The description is two-dimensional (2D), covering two main regions, the cathode sheath and the ionization region, both contributing to electron energization. A parabolic potential in the axial direction governs the cathode sheath.