Transmission Kikuchi Diffraction Mapping Induces Structural Damage in Atom Probe Specimens.

Measuring local chemistry of specific crystallographic features by atom probe tomography (APT) is facilitated by using transmission Kikuchi diffraction (TKD) to help position them sufficiently close to the apex of the needle-shaped specimen. However, possible structural damage associated to the energetic electrons used to perform TKD is rarely considered and is hence not well-understood. Here, in two case studies, we evidence damage in APT specimens from TKD mapping.