Sub-nanometer flattening of 45 cm long, 45 actuator x-ray deformable mirror.

We have built a 45 cm long x-ray deformable mirror (XDM) of super-polished single-crystal silicon that has 45 actuators along the tangential axis. After assembly, the surface height error was 19 nm rms. With use of high-precision visible-light metrology and precise control algorithms, we have actuated the XDM and flattened its entire surface to 0.