In spite of strict limits on outgassing from organic materials, some spacecraft instruments making long-term measurements of solar extreme ultraviolet (EUV) radiation still suffer significant degradation. While such measures have reduced the rate of degradation, they have not completely eliminated it in some cases. For example, in five years, the aluminum filters used in the (EVE) instruments onboard the (SDO) suffered losses exceeding 40% at 30.
View Article and Find Full Text PDFThe National Institute of Standards and Technology operates two spectral comparator facilities, both of which are used to provide detector calibrations from the ultraviolet to the near-infrared spectral range. One, the Ultraviolet Spectral Comparator Facility (UV SCF), has been in operation for more than two decades, providing one of the core calibration services. Recently, the illumination source used in the UV SCF has been changed from an argon mini-arc source to a laser-driven plasma light source.
View Article and Find Full Text PDFJ Res Natl Inst Stand Technol
July 2016
Currently the most demanding application of extreme ultraviolet optics is connected with the development of extreme ultraviolet lithography. Not only does each of the Mo/Si multilayer extreme-ultraviolet stepper mirrors require the highest attainable reflectivity at 13 nm (nearly 70 %), but the central wavelength of the reflectivity of these mirrors must be measured with a wavelength repeatability of 0.001 nm and the peak reflectivity of the reflective masks with a repeatability of 0.
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