X-ray dynamical diffraction by quasi-monolayer graphene.

We study the processes of dynamical diffraction of the plane X-ray waves on the graphene film/SiC substrate system in the case of the Bragg diffraction geometry. The statistical dynamical theory of X-ray diffraction in imperfect crystals is applied to the case of real quasi-two-dimensional systems. The necessity of the taking into account of the variability of the lattice parameter of multilayer graphene, as well as the influence of thickness on the thermal Debye-Waller factor at the calculation of the complex structural factors and Fourier components of polarizability, is demonstrated.