Nucleation sequence of InAs quantum dots on cross-hatch patterns.

InAs quantum dots (QDs) are grown via molecular beam epitaxy on cross-hatch pattern (CHP) templates that result from lattice-mismatched epitaxy of In(x)Ga(1-x)As on (100)-GaAs substrates. Growth of InAs on low-(x = 0.10) and medium-(x = 0.