Strain-induced enhancement of plasma dispersion effect and free-carrier absorption in SiGe optical modulators.

The plasma dispersion effect and free-carrier absorption are widely used to change refractive index and absorption coefficient in Si-based optical modulators. However, the weak free-carrier effects in Si cause low modulation efficiency, resulting in large device footprint and power consumption. Here, we theoretically and experimentally investigate the enhancement of the free-carrier effects by strain-induced mass modulation in silicon-germanium (SiGe).