Metal-Multilayered Nanomechanical Cantilever Sensor for Detection of Molecular Adsorption.

A metal-multilayered nanomechanical cantilever sensor was proposed to reduce the temperature effect for highly sensitive gas molecular detection. The multilayer structure of the sensor reduces the bimetallic effect, allowing for the detection of differences in molecular adsorption properties on various metal surfaces with higher sensitivity. Our results indicate that the sensor exhibits higher sensitivity to molecules with greater polarity under mixed conditions with nitrogen gas.

Microfabrication of functional polyimide films and microstructures for flexible MEMS applications.

Polyimides are widely used in the MEMS and flexible electronics fields due to their combined physicochemical properties, including high thermal stability, mechanical strength, and chemical resistance values. In the past decade, rapid progress has been made in the microfabrication of polyimides. However, enabling technologies, such as laser-induced graphene on polyimide, photosensitive polyimide micropatterning, and 3D polyimide microstructure assembly, have not been reviewed from the perspective of polyimide microfabrication.

Measurement of cellular thermal properties and their temperature dependence based on frequency spectra an on-chip-integrated microthermistor.

To understand the mechanism of intracellular thermal transport, thermal properties must be elucidated, particularly thermal conductivity and specific heat capacity. However, these properties have not been extensively studied. In this study, we developed a cellular temperature measurement device with a high temperature resolution of 1.

Demonstration of Heterogeneous Structure for Fabricating a Comb-Drive Actuator for Cryogenic Applications.

This study presents an experimental demonstration of the motion characteristics of a comb-drive actuator fabricated from heterogeneous structure and applied for cryogenic environments. Here, a silicon wafer is anodically bonded onto a glass substrate, which is considered to be a conventional heterogeneous structure and is commonly adopted for fabricating comb-drive actuators owing to the low-cost fabrication. The displacement sensor, also with comb-finger configuration, is utilized to monitor the motion characteristics in real time at low temperatures.

Observation of spin-current striction in a magnet.

The interplay among magnetization and deformation of solids has long been an important issue in magnetism, the elucidation of which has made great progress in material physics. Controlling volume and shapes of matter is now indispensable to realizing various actuators for precision machinery and nanotechnology. Here, we show that the volume of a solid can be manipulated by injecting a spin current: a spin current volume effect (SVE).

Quality factor control of mechanical resonators using variable phononic bandgap on periodic microstructures.

The quality factor (Q-factor) is an important parameter for mechanical resonant sensors, and the optimal values depend on its application. Therefore, Q-factor control is essential for microelectromechanical systems (MEMS). Conventional methods have some restrictions, such as additional and complicated equipment or nanoscale dimensions; thus, structural methods are one of the reasonable solutions for simplifying the system.

Three-dimensional imaging of electron spin resonance-magnetic resonance force microscopy at room temperature.

In this study, we demonstrated the three-dimensional (3D) imaging by magnetic resonance force microscopy (MRFM) based on electron spin resonance (ESR) measurements at room temperature. For a microsample containing radicals, the 3D force distribution was obtained using a custom-made Si nanowire and a permanent magnetic particle. Calculation using precise values of the magnetic field distribution is required to define an accurate response function for the 3D deconvolution processing of the spin density distribution.

Reflection-type vapor cell for micro atomic clocks using local anodic bonding of 45° mirrors.

This Letter reports the design, fabrication, and evaluation of reflection-type planar vapor cells for chip-scale atomic clocks. The cell with 2-8 mm cavity length contains two 45° Bragg reflector mirrors assembled using a local anodic bonding. Coherent population trapping resonance of Rb atoms is observed, realizing an atomic clock operation.

Formation and Evaluation of Silicon Substrate with Highly-Doped Porous Si Layers Formed by Metal-Assisted Chemical Etching.

Porous silicon (Si) is a low thermal conductivity material, which has high potential for thermoelectric devices. However, low output performance of porous Si hinders the development of thermoelectric performance due to low electrical conductivity. The large contact resistance from nonlinear contact between porous Si and metal is one reason for the reduction of electrical conductivity.

Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices.

This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro- and nano-devices. The AZO thin film is deposited successfully by atomic layer deposition (ALD). 50 nm-thick AZO film with high uniformity is checked by scanning electron microscopy.

Micro-Fabricated Presure Sensor Using 50 nm-Thick of Pd-Based Metallic Glass Freestanding Membrane.

This paper reports on micro-fabricated pressure sensors based on a thin metallic glass membrane. The PdCuSi metallic glass material is deposited successfully by a sputter technique. An amorphous feature of the deposited film is confirmed by high resolution transmission electron microscopy (HR-TEM) and the corresponding the selected area electron diffraction (SAED).

Hermetically Packaged Microsensor for Quality Factor-Enhanced Photoacoustic Biosensing.

The use of photoacoustics (PA) being a convenient non-invasive analysis tool is widespread in various biomedical fields. Despite significant advances in traditional PA cell systems, detection platforms capable of providing high signal-to-noise ratios and steady operation are yet to be developed for practical micro/nano biosensing applications. Microfabricated transducers offer orders of magnitude higher quality factors and greatly enhanced performance in extremely miniature dimensions that is unattainable with large-scale PA cells.

Magnetostrictive Performance of Electrodeposited TbDyFe Thin Film with Microcantilever Structures.

The microfabrication with a magnetostrictive TbDyFe thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbDyFe is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the TbDyFe thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field.

Thermoelectrical properties of silicon substrates with nanopores synthesized by metal-assisted chemical etching.

A silicon substrate consisting of nanoporous silicon film could enhance the thermoelectric performance of bulk silicon due to its low thermal conductivity. Metal-assisted chemical etching (MACE) is a wet method for fabricating diverse nano/micro structures, which uses a noble metal as the catalyst for etching of semiconductor materials. In this study, we report the thermoelectrical properties of silicon substrates with nanopores in different porosities fabricated by MACE employing Ag nanoparticle as a metal catalyst.

Spin Seebeck mechanical force.

Electric current has been used to send electricity to far distant places. On the other hand, spin current, a flow of electron spin, can in principle also send angular momentum to distant places. In a magnet, there is a universal spin carrier called a spin wave, a wave-type excitation of magnetization.

Mechanically strengthened graphene-Cu composite with reduced thermal expansion towards interconnect applications.

High-density integration technologies with copper (Cu) through-silicon via (TSV) have emerged as viable alternatives for achieving the requisite integration densities for the portable electronics and micro-electro-mechanical systems (MEMSs) package. However, significant thermo-mechanical stresses can be introduced in integrated structures during the manufacturing process due to mismatches of thermal expansion and the mechanical properties between Cu and silicon (Si). The high-density integration demands an interconnection material with a strong mechanical strength and small thermal expansion mismatch.

Nano and Microsensors for Mammalian Cell Studies.

This review presents several sensors with dimensions at the nano- and micro-scale used for biological applications. Two types of cantilever beams employed as highly sensitive temperature sensors with biological applications will be presented. One type of cantilever beam is fabricated from composite materials and is operated in the deflection mode.

Design and Fabrication of Capacitive Silicon Nanomechanical Resonators with Selective Vibration of a High-Order Mode.

This paper reports the design and fabrication of capacitive silicon nanomechanical resonators with the selective vibration of a high-order mode. Fixed-fixed beam capacitive silicon resonators have been successfully produced by the use of electron beam lithography, photolithography, deep reactive ion etching, and anodic bonding methods. All resonators with different vibration modes are designed to have the same resonant frequency for performance comparison.

Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method.

In this work, we report a simple and low-cost way to create nanopores that can be employed for various applications in nanofluidics. Nano sized Ag particles in the range from 1 to 20 nm are formed on a silicon substrate with a de-wetting method. Then the silicon nanopores with an approximate 15 nm average diameter and 200 μm height are successfully produced by the metal-assisted chemical etching method.

Synthesis and Evaluation of Thick Films of Electrochemically Deposited Bi₂Te₃ and Sb₂Te₃ Thermoelectric Materials.

This paper presents the results of the synthesis and evaluation of thick thermoelectric films that may be used for such applications as thermoelectric power generators. Two types of electrochemical deposition methods, constant and pulsed deposition with improved techniques for both N-type bismuth telluride (Bi₂Te₃) and P-type antimony telluride (Sb₂Te₃), are performed and compared. As a result, highly oriented Bi₂Te₃ and Sb₂Te₃ thick films with a bulk-like structure are successfully synthesized with high Seebeck coefficients and low electrical resistivities.

Highly sensitive thermometer using a vacuum-packed Si resonator in a microfluidic chip for the thermal measurement of single cells.

A highly sensitive thermometer system for a living cell is proposed, fabricated, and evaluated. The system possesses a resonant thermal sensor surrounded by vacuum in a microfluidic chip. The measurement principle relies on resonant frequency tracking of the resonator in temperature variations due to the heat from a sample cell; the heat is conducted from the sample cell in the microfluidic channel via a heat guide connecting the resonator to a sample stage.

Level repulsion of GHz phononic surface waves in quartz substrate with finite-depth holes.

This paper presents numerical and experimental results on the level repulsion of gigahertz surface acoustic waves in an air/ST-cut quartz phononic structure with finite-depth holes. The colorful dispersion with the parameter of the in-plane (sagittal plane) ratio of polarization was adopted to determine the Rayleigh wave bandgap induced by the level repulsion. The results of numerical analyses showed that the frequency and width of the bandgap induced by the level repulsion strongly depend on the geometry of the air holes in the phononic structure.

Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process.

This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. Silicon through-wafer interconnects have been investigated by the glass reflow process. Then, the patterned silicon-glass reflow wafer is anodically bonded to an SOI (silicon-on-insulator) wafer for the fabrication of CMUT devices.

An Investigation of Processes for Glass Micromachining.

This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as disadvantages of each method are presented and discussed in light of the experiments. Sandblast and wet etching techniques are simple processes but face difficulties in small and high-aspect-ratio structures.

Pulse-Reverse Electrodeposition and Micromachining of Graphene-Nickel Composite: An Efficient Strategy toward High-Performance Microsystem Application.

Graphene reinforced nickel (Ni) is an intriguing nanocomposite with tremendous potential for microelectromechanical system (MEMS) applications by remedying mechanical drawbacks of the metal matrix for device optimization, though very few related works have been reported. In this paper, we developed a pulse-reverse electrodeposition method for synthesizing graphene-Ni (G-Ni) composite microcomponents with high content and homogeneously dispersed graphene filler. While the Vickers hardness is largely enhanced by 2.