Three-dimensionally crossing manifold micro-mixer for fast mixing in a short channel length.

In this study, we report a neo-conceptive three-dimensionally (3D) crossing manifold micromixer (CMM) embedded in microchannel. Fabricated by sequential processes of photolithography and two photon absorption stereolithography, this leads to a microfluidic system with a built-in micromixer in a site controlled manner. The effectiveness of CMM is investigated numerically and experimentally.

Proportional enlargement of movement by using an optically driven multi-link system with an elastic joint.

Diverse movements using optical manipulation have been introduced. These are generally performed in the focal region of the laser beam. To achieve a wider range of movements based on precise motion transformation, an effective method for optical manipulation that overcomes the important obstacles such as small optical trapping forces, friction, and the viscosity of fluids is required.

Fabrication of three-dimensional SiC ceramic microstructures with near-zero shrinkage via dual crosslinking induced stereolithography.

Three-dimensional SiC ceramic microstructures with near-zero shrinkage were fabricated from a simple inorganic polymer mixture by inducing dual photocuring routes to produce highly dense polymer features by stereolithography and subsequent pyrolysis at 600 degrees C.

Fabrication of nano- and micro-scale UV imprint stamp using diamond-like carbon coating technology.

Two-dimensional (2-D) and three-dimensional (3-D) diamond-like carbon (DLC) stamps for ultraviolet nanoimprint lithography were fabricated with two methods: namely, a DLC coating process, followed by focused ion beam lithography; and two-photon polymerization patterning, followed by nanoscale-thick DLC coating. We used focused ion beam lithography to fabricate 70 nm deep lines with a width of 100 nm, as well as 70 nm deep lines with a width of 150 nm, on 100 nm thick DLC layers coated on quartz substrates. We also used two-photon polymerization patterning and a DLC coating process to successfully fabricate 200 nm wide lines, as well as 3-D rings with a diameter of 1.