Publications by Tae-Sub Kim

Publications by authors named "Tae-Sub Kim"

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Titanium dioxide thin films deposited by plasma enhanced atomic layer deposition for OLED passivation.

Woong-Sun Kim Myoung-Gyun Ko Tae-Sub Kim Sang-Kyun Park Yeon-Keon Moon

J Nanosci Nanotechnol

September 2008

Plasma enhanced atomic layer deposition (PEALD) of titanium dioxide thin films was conducted using Tetrakis dimethylamino titanium (TDMATi) and an oxygen plasma on a polyethersulfon (PES) substrate at a deposition temperature of 90 degrees C. The effects of the induced plasma power on passivation properties were investigated according to film thickness. The growth rate of the titanium dioxide film was 0.

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