The article is dedicated to measuring the thickness of step height standards using the author's version of the variable wavelength interferometer (VAWI) in the reflected-light mode, where the interference pattern is created by the combination of two Wollaston prisms. The element of novelty consists in replacing the traditional search for the coincidence of fringes in the object and background with a continuous measurement of their periods and phases relative to the zero-order fringe. The resulting system of sinusoids is then analyzed using two methods: the classical one and the second utilizing the criterion of uniform thickness.
View Article and Find Full Text PDFNew matrix formulas for structural optical design have been obtained from analysis of derivative of the system matrix in respect to construction parameters and movements of components. Functional parameters of the optical system become elements of the matrix, presenting working conditions of the optical system. Developed methodology of structural design multi-group zoom systems with unlimited number of components and with mechanical-electronic compensation is presented.
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