A review of the existing and emerging technologies for wastewaters containing tetramethyl ammonium hydroxide (TMAH) and waste management systems in micro-chip microelectronic industries.

The present work aims to describe and review the available technologies and the recent advancements in treating industrial wastewater containing tetramethylammonium hydroxide (TMAH). It is a quaternary ammonium salt and widely used in the microelectronics industry; this kind of company produces large quantities of wastewater containing TMAH. The exhausted solutions must be treated appropriately since TMAH is corrosive, toxic to human health, and ecotoxic.