Effect of humidity treatments on porosity and mechanical integrity of mesoporous silica films.

The beneficial effects humidity treatments have on molecularly templated mesoporous silica films with respect to elastic modulus, with minimal detrimental effects on porosity and dielectric constant, were identified.

Effects of trace metals and organic additives on porosity and dielectric constant of high purity mesoporous silica films.

The beneficial effects that alkali metal and alkylammonium salt additions to molecularly templated silica sols have on the resulting mesoporous silica films formed from evaporative-coating methods with respect to porosity, elastic modulus, dielectric constant, and film surface uniformity were investigated and identified.