The rapid advancement and stringent requirements of extreme ultraviolet (EUV) lithography technology necessitate the development of advanced photoresist systems for next-generation microelectronics. Recent studies have demonstrated that inorganic-based hybrid photoresists offer notable improvements in EUV sensitivity, etch resistance, and greater insusceptibility to pattern collapse compared to their purely organic counterparts. However, variations in the synthesis/coating approaches and chemistry of inorganic-organic photoresists can result in distinct exposure mechanisms.
View Article and Find Full Text PDFACS Appl Mater Interfaces
March 2025
Transient electronics, designed to degrade after a defined period, are ideal for biomedical implants that eliminate the need for secondary removal surgeries and contribute to sustainable electronics by leaving no electronic waste. While significant progress has been made in developing semiconductors, electrodes, and substrates, dielectric layers for bioapplicable transient electronics that combine flexibility, self-healing capabilities, and high dielectric constants (high-k) remain underexplored. This study introduces urea-linked polycaprolactone (PCL-IU)/ionic liquid (IL) hybrids as dielectric materials.
View Article and Find Full Text PDFIn this study, we devised an innovative cartridge-type modular photodetector designed to boost the photoresponse of two-dimensional (2D) materials by utilizing up-conversion particles (UCPs) in selective infrared (IR) regions beyond the bandgap. The merit of this structure is that the incident near-infrared or short wave infrared (SWIR) light, after passing through the 2D SnSe channel layer, is converted into visible light via the up-conversion effect and then reabsorbed by SnSe. To further optimize the photoresponse improvement in the SWIR region, we fine-tuned the dopant material and its concentration for the UCPs, attaining a 3.
View Article and Find Full Text PDFACS Appl Mater Interfaces
January 2025
In this work, we present a facile and straightforward approach for fabricating highly stretchable photodetectors based on AgS and TiCT MXene hybrid materials. These devices exhibit exceptional mechanical resilience, maintaining stable electrical and optical performance even after 10 000 cycles of 30% strain. The incorporation of MXene not only enhances the device's electrical durability but also ensures the retention of conductivity under significant mechanical deformation, positioning MXene as a critical material for the advancement of flexible electronics.
View Article and Find Full Text PDFIn this study, we developed an HS gas sensor based on a MXene/MoS heterostructure, using the Langmuir-Blodgett (LB) technique and chemical vapor deposition (CVD). TiCT MXene nanosheets were uniformly transferred onto SiO/Si substrates the LB technique, achieving near-complete coverage. Subsequently, flower-like MoS was grown on the MXene-coated substrate through CVD, with vertical growth observed on the MXene layers.
View Article and Find Full Text PDFACS Appl Mater Interfaces
December 2024
As the societal issue of increasing global illicit drug usage emerges, there is a growing demand for more portable and versatile drug detectors. Traditional drug analysis techniques such as gas chromatography (GC), liquid chromatography (LC), and Fourier transform infrared spectroscopy (FTIR) face significant challenges in adapting to diverse real-world applications due to their size, cost, and power requirements. While advancements have been made in the development of on-site drug detection methods such as fluorescence, stereoresonance energy transfer (FRET), colorimetric, electrochemical sensing, and lateral flow assays (LFAs), their reliance on specific reactive materials poses limitations in effectively detecting a wide range of narcotics.
View Article and Find Full Text PDFRecently, tellurium (Te) has been proposed as a promising p-type material; however, even the state-of-the-art results couldn't overcome the critical roadblocks for its practical applications, such as large - hysteresis and high off-state leakage current. We developed a novel Te atomic layer deposition (ALD) process combined with a TeO seed layer and AlO passivation to detour the limitations of p-type Te semiconducting materials. Also, we have identified the origins of high hysteresis and off current using the 77 K operation study and passivation process optimization.
View Article and Find Full Text PDFDespite the advancement of the Internet of Things (IoT) and portable devices, the development of zero-biased sensing systems for the dual detection of light and gases remains a challenge. As an emerging technology, direct energy conversion driven by intriguing physical properties of two-dimensional (2D) materials can be realized in nanodevices or a zero-biased integrated system. In this study, we unprecedentedly attempted to exploit the photostimulated pyrothermoelectric coupling of two-dimensional SnSe for use in zero-biased multimodal transducers for the dual detection of light and gases.
View Article and Find Full Text PDFACS Appl Mater Interfaces
June 2024
This paper reports chemiresistive multiarray gas sensors through the synthesized ternary nanocomposites, using a one-pot method to integrate two-dimensional MXene (TiCT) with Ti-doped WO (Ti-WO/TiCT) and TiCT with Pd-doped SnO (Pd-SnO/TiCT). The gas sensors based on Ti-WO/TiCT and Pd-SnO/TiCT exhibit exceptional sensitivity, particularly in detecting 70% at 1 ppm acetone and 91.1% at 1 ppm of HS.
View Article and Find Full Text PDFPortable and personalized artificial intelligence (AI)-driven sensors mimicking human olfactory and gustatory systems have immense potential for the large-scale deployment and autonomous monitoring systems of Internet of Things (IoT) devices. In this study, an artificial Q-grader comprising surface-engineered zinc oxide (ZnO) thin films is developed as the artificial nose, tongue, and AI-based statistical data analysis as the artificial brain for identifying both aroma and flavor chemicals in coffee beans. A poly(vinylidene fluoride-co-hexafluoropropylene)/ZnO thin film transistor (TFT)-based liquid sensor is the artificial tongue, and an Au, Ag, or Pd nanoparticles/ZnO nanohybrid gas sensor is the artificial nose.
View Article and Find Full Text PDFThe tunable properties of 2D transition-metal dichalcogenide (TMDs) materials are extensively investigated for high-performance and wavelength-tunable optoelectronic applications. However, the precise modification of large-scale systems for practical optoelectronic applications remains a challenge. In this study, a wafer-scale atomic assembly process to produce 2D multinary (binary, ternary, and quaternary) TMDs for broadband photodetection is demonstrated.
View Article and Find Full Text PDFIontronic devices, recognized for user-friendly soft electronics, establish an electrical double layer (EDL) at the interface between ion gels and electrodes, significantly influencing device performance. Despite extensive research on ion gels and diverse electrode materials, achieving a stable interfacial formation remains a persistent challenge. In this work, we report a solution to address this challenge by employing CO irradiation as a bottom-up methodology to directly fabricate highly conductive, conformable laser-induced graphene (LIG) electrodes on a polyimide (PI)-based ion gel.
View Article and Find Full Text PDFACS Appl Mater Interfaces
November 2023
Interparticle electronic coupling is essential for self-assembled colloidal nanocrystal (NC) solid semiconductors to fulfill their wide-tunable electrical and optoelectrical properties, but it has been limited by disorders. Here, a disorder-tolerant coupling approach is presented by synthesizing self-organized NC solids based on amorphous/nanocrystalline phase-composites. The ZnO amorphous matrix, which infills the space between the less regularly ordered ZnO NCs, enables robust electronic coupling between neighboring NCs via the resonant wave function overlap, leading to a disorder-tolerant resonant conducting state.
View Article and Find Full Text PDFStructural engineering and hybridization of heterogeneous 2D materials can be effective for advanced supercapacitor. Furthermore, architectural design of electrodes particularly with vertical construction of structurally anisotropic graphene nanosheets, can significantly enhance the electrochemical performance. Herein, MXene-derived TiO nanocomposites hybridized with vertical graphene is synthesized via CO laser irradiation on MXene/graphene oxide nanocomposite film.
View Article and Find Full Text PDFDespite the encouraging properties and research of 2D MoS , an ongoing issue associated with the oxidative instability remains elusive for practical optoelectronic applications. Thus, in-depth understanding of the oxidation behavior of large-scale and homogeneous 2D MoS is imperative. Here the structural and chemical transformations of large-area MoS multilayers by air-annealing with altered temperature and time via combinatorial spectro-microscopic analyses (Raman spectroscopy, X-ray photoelectron spectroscopy, and atomic force microscopy) are surveyed.
View Article and Find Full Text PDFBackground: Children's motor development is a crucial tool for assessing developmental levels, identifying developmental disorders early, and taking appropriate action. Although the Korean Developmental Screening Test for Infants and Children (K-DST) can accurately assess childhood development, its dependence on parental surveys rather than reliable, professional observation limits it. This study constructed a dataset based on a skeleton of recordings of K-DST behaviors in children aged between 20 and 71 months, with and without developmental disorders.
View Article and Find Full Text PDFMIL-101-NH(Fe) is one of the effective photocatalytic metal-organic frameworks (MOFs) working under visible light. However, its powder-type form inhibits reusability in practical applications. In this study, we immobilized MIL-101-NH(Fe) on a polymeric microfiber mesh to improve reusability while minimizing the loss of catalytic performance.
View Article and Find Full Text PDFThe rising importance of gas detection has prompted rigorous research on flexible and transparent high-performance gas sensors. We demonstrated a sensor for NO detection at room temperature, in which our device was fabricated screen printing on a flexible substrate, and MoS and single-walled carbon nanotube (SWCNT) were coated on a specific area by the self-assembly method. This fabrication process is rapid, facile, and cost-effective.
View Article and Find Full Text PDFThe recent introduction of alkali metal halide catalysts for chemical vapor deposition (CVD) of transition metal dichalcogenides (TMDs) has enabled remarkable two-dimensional (2D) growth. However, the process development and growth mechanism require further exploration to enhance the effects of salts and understand the principles. Herein, simultaneous predeposition of a metal source (MoO ) and salt (NaCl) by thermal evaporation is adopted.
View Article and Find Full Text PDFA synthetic platform for industrially applicable two-dimensional (2D) semiconductors that addresses the paramount issues associated with large-scale production, wide-range photosensitive materials, and oxidative stability has not yet been developed. In this study, we attained the 6 in. scale production of 2D SnSe semiconductors with spatial homogeneity using a rational synthetic platform based on the thermal decomposition of solution-processed single-source precursors.
View Article and Find Full Text PDFThe increase in the number and complexity of process levels in semiconductor production has driven the need for the development of new measurement methods that can evaluate semiconductor devices at the critical dimensions of fine patterns and simultaneously inspect nanoscale contaminants or defects. However, conventional optical inspection methods often fail to resolve device patterns or defects at the level of tens of nanometers required for device development owing to their diffraction-limited resolutions. In this study, we used the stochastic optical reconstruction microscopy (STORM) technique to image semiconductor nanostructures with feature sizes as small as 30 nm and detect individual 20 nm-diameter contaminants.
View Article and Find Full Text PDFA challenge for chemiresistive-type gas sensors distinguishing mixture gases is that for highly accurate recognition, massive data processing acquired from various types of sensor configurations must be considered. The impact of data processing is indeed ineffective and time-consuming. Herein, we systemically investigate the effect of the selectivity for a target gas on the prediction accuracy of gas concentration machine learning based on a support vector machine model.
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