Aiming at the bottleneck problem of insufficient selectivity of metal oxide gas sensors, a reliable scheme to improve selectivity is proposed, that is, a laminated sensor structure of a gas-sensitive membrane plus catalytic membrane combined with the temperature modulation technology. It is presented as a highly selective ethanol sensor as an example for verification. The laminated gas sensor is made of Sr@SnO as the gas-sensing membrane and ZSM-5 as the catalytic membrane by the microelectro mechanical system.
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