Publications by authors named "Su Been Yoo"

As semiconductor device architecture develops, from planar field-effect transistors (FET) to FinFET and gate-all-around (GAA), there is an increased need to measure 3D structure sidewalls precisely. Here, we present a 3-Dimensional Atomic Force Microscope (3D-AFM), a powerful 3D metrology tool to measure the sidewall roughness (SWR) of vertical and undercut structures. First, we measured three different dies repeatedly to calculate reproducibility in die level.

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Reinforced concrete is among the most multifaceted materials used in the construction field. Maintaining the resistance of reinforced concrete to weathering, abrasion, and chemical attack, particularly in aggressive natural conditions such as seawater environments, is challenging. The main factor in the degradation of reinforced-concrete durability is chloride penetration, which accelerates iron alloy corrosion and facilitates structural degradation.

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