Correlation between in Situ Diagnostics of the Hydrogen Plasma and the Interface Passivation Quality of Hydrogen Plasma Post-Treated a-Si:H in Silicon Heterojunction Solar Cells.

Passivation of the interface defect states is crucial to mitigate the recombination losses in silicon solar cells. In this work, we have investigated the role of hydrogen plasma treatment (HPT) to passivate the interfacial defects between crystalline (c-Si) and hydrogenated amorphous silicon (a-Si:H) in silicon heterojunction (SHJ) solar cells. For the first time, we have found a correlation between the dynamic properties of hydrogen plasma and passivation quality of the films by using in situ optical emission spectroscopy and quasi-steady state photoconductance measurement.