High thermo-optic tunability in PECVD silicon-rich amorphous silicon carbide.

In this work, the thermo-optic coefficient (TOC) of the silicon-rich amorphous silicon carbide (a-SiC) thin film deposited by plasma-enhanced chemical vapor deposition (PECVD) was characterized. We found that the TOC of the film increases as its silicon content increases. A more than threefold improvement in the TOC was measured, reaching a TOC as high as 1.

Realization of a wide steering end-fire facet optical phased array using silicon rich silicon nitride.

The design, fabrication, and characterization of a 16-element optical phased array (OPA) using a high index (n = 3.1) silicon-rich silicon nitride (SRN) is demonstrated. We present one-dimensional beam steering with end-fire facet antennas over a wide steering range of >115° at a fixed wavelength of 1525 nm.

Silicon-organic hybrid thermo-optic switch based on a slot waveguide directional coupler.

We propose and demonstrate a passively biased 2 × 2 thermo-optic switch with high power efficiency and fast response time. The device benefits from the highly concentrated optical field of a slot waveguide mode and the strong thermo-optic effect of a nematic liquid crystal (NLC) cladding. The NLC fills the nano-slot region and is aligned by the subwavelength grating inside.

Efficient and compact thermo-optic phase shifter in silicon-rich silicon nitride.

The design, fabrication, and characterization of low-loss ultra-compact bends in high-index (=3.1 at =1550) plasma-enhanced chemical vapor deposition silicon-rich silicon nitride (SRN) were demonstrated and utilized to realize efficient, small footprint thermo-optic phase shifter. Compact bends were structured into a folded waveguide geometry to form a rectangular spiral within an area of 65×65µ, having a total active waveguide length of 1.

Highly sensitive silicon photonic temperature sensor based on liquid crystal filled slot waveguide directional coupler.

A highly sensitive silicon photonic temperature sensor based on silicon-on-insulator (SOI) platform has been proposed and demonstrated. A two-mode nano-slot waveguide device structure cladded with a nematic liquid crystal (LC), E7, was adopted to facilitate strong light-matter interaction and achieve high sensitivity. The fabricated sensor was characterized by measuring the optical transmission spectra at different ambient temperatures.

Thermo-optic properties of silicon-rich silicon nitride for on-chip applications.

We demonstrate the thermo-optic properties of silicon-rich silicon nitride (SRN) films deposited using plasma-enhanced chemical vapor deposition (PECVD). Shifts in the spectral response of Mach-Zehnder interferometers (MZIs) as a function of temperature were used to characterize the thermo-optic coefficients of silicon nitride films with varying silicon contents. A clear relation is demonstrated between the silicon content and the exhibited thermo-optic coefficient in silicon nitride films, with the highest achievable coefficient being as high as (1.