An electron monochromator design is presented as an instrumental development for electron energy loss spectroscopy (EELS) and imaging in (scanning) transmission electron microscopy ((S)TEM). The main purpose of this development is enhancing the energy resolving power in spectroscopy and filtering. In addition, it helps reducing the effect of the objective lens' chromatic aberration C in imaging and therefore, enhancing the spatial resolving power of electron microscopes.
View Article and Find Full Text PDFUltimate resolution in scanning transmission electron microscopy (STEM) with state-of-the-art aberration correctors requires careful tuning of the experimental parameters. The optimum aperture semi-angle depends on the chosen high tension, the chromatic aberration and the energy width of the source as well as on potentially limiting intrinsic residual aberrations. In this paper we derive simple expressions and criteria for choosing the aperture semi-angle and for counterbalancing the intrinsic sixth-order three-lobe aberration of two-hexapole aberration correctors by means of the fourth-order three-lobe aberration.
View Article and Find Full Text PDFAtomic resolution in transmission electron microscopy of thin and light-atom materials requires a rigorous reduction of the beam energy to reduce knockon damage. However, at the same time, the chromatic aberration deteriorates the resolution of the TEM image dramatically. Within the framework of the SALVE project, we introduce a newly developed C_{c}/C_{s} corrector that is capable of correcting both the chromatic and the spherical aberration in the range of accelerating voltages from 20 to 80 kV.
View Article and Find Full Text PDFThermal magnetic field noise from magnetic and non-magnetic conductive parts close to the electron beam recently has been identified as a reason for decoherence in high-resolution transmission electron microscopy (TEM). Here, we report about new experimental results from measurements for a layered structure of magnetic and non-magnetic materials. For a simplified version of this setup and other situations we derive semi-analytical models in order to predict the strength, bandwidth and spatial correlation of the noise fields.
View Article and Find Full Text PDFThe resolving power of an electron microscope is determined by the optics and the stability of the instrument. Recently, progress has been obtained towards subångström resolution at beam energies of 80 kV and below but a discrepancy between the expected and achieved instrumental information limit has been observed. Here we show that magnetic field noise from thermally driven currents in the conductive parts of the instrument is the root cause for this hitherto unexplained decoherence phenomenon.
View Article and Find Full Text PDFJ Electron Microsc (Tokyo)
June 2009
Contrast-transfer calculations indicate that C(c) correction should be highly beneficial for high-resolution and energy-filtered transmission electron microscopy. A prototype of an electron optical system capable of correcting spherical and chromatic aberration has been used to verify these calculations. A strong improvement in resolution at an acceleration voltage of 80 kV has been measured.
View Article and Find Full Text PDFAberration correctors using hexapole fields have proven useful to correct for the spherical aberration in electron microscopy. We investigate the limits of the present design for the hexapole corrector with respect to minimum probe size for the scanning transmission electron microscope and discuss several ways in which the design could be improved by rather small and incremental design changes for the next generation of advanced probe-forming systems equipped with a gun monochromator.
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