Sensor for the Characterization of 2D Angular Actuators with Picoradian Resolution and Nanoradian Accuracy with Microradian Range.

High precision angular actuators are used for high demanding applications such as laser steering for photolithography. Piezo technology allows developing actuators with a resolution as low as a few nanoradians, with bandwidths as high as several kilohertz. In most demanding applications, the actual performance of these instruments needs to be characterized.