Soft X-ray absorption of thin films detected using substrate luminescence: a performance analysis.

X-ray absorption spectroscopy of thin films is central to a broad range of scientific fields, and is typically detected using indirect techniques. X-ray excited optical luminescence (XEOL) from the sample's substrate is one such detection method, in which the luminescence signal acts as an effective transmission measurement through the film. This detection method has several advantages that make it versatile compared with others, in particular for insulating samples or when a probing depth larger than 10 nm is required.